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ACCELERATING

SlideSlideSlide

 



SEMICONDUCTOR INNOVATION




FAB PROCESS OPTIMIZATION




GROWTH IN EVERY DIMENSION


THREE TECHNOLOGIES, ONE POWERFUL PLATFORM

Built on our next-generation Purion platform, our suite of ion implanters
delivers the highest levels of precision, purity and productivity with the
lowest cost of ownership.




TECHNOLOGY SPOTLIGHT


INNOVATIVE ION SOURCE TECHNOLOGY

Axcelis’ innovative source technology, featuring H2 as a co-gas with fluorine
based dopants, will optimize your implanter performance by reducing glitches,
reducing tungsten metal contamination and increasing source lifetimes.

Learn More




NEWS

See More News

February 9, 2023

Axcelis Announces Financial Results for Fourth Quarter and Full Year 2022

January 25, 2023

Axcelis Announces Follow-on Shipments of Purion HTM High Current Implanters to
Advanced Logic Semiconductor Fabs

January 25, 2023

Axcelis Announces Participation in SEMICON Korea 2023




LET’S TALK

Tell us about your semiconductor fab challenges and let Axcelis show you how to
improve precision, purity and productivity.

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© 2022 Axcelis
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Axcelis Technologies
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Phone: 978.787.4000
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 * Home
 * Applications
   * Overview
   * Advanced Logic
   * Image Sensors
   * Mature Process Technologies
   * Memory (DRAM and NAND)
   * Power Devices
   * Back
 * Products
   * Overview
   * High Current
   * High Energy
   * Mid Current
   * GSD Ovation
   * Back
 * Support
 * Knowledge Center
   * Overview
   * Productivity
   * Process Improvement
   * Back
 * News & Events
 * Investors
 * Careers
   * Why work at Axcelis?
   * Benefits
   * Recruiting
   * Search Current Openings
   * Back
 * About Us
   * Overview
   * Leadership
   * Innovation Centers
   * Environmental, Social and Governance Matters
     * ESG Documents Hub
     * Back
   * Contact Us
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 * Supplier Portal
 * Employee Portal

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